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Reference data generation method, pattern defect inspection apparatus, pattern defect inspection method, and reference data generation program
Reference data generation method, pattern defect inspection apparatus, pattern defect inspection method, and reference data generation program
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机译：参考数据生成方法，图案缺陷检查装置，图案缺陷检查方法和参考数据生成程序
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摘要
A method of generating reference data is disclosed, in which two-value or multi-value gradated data of pixels is obtained in units of pixels from a design data of a pattern to be formed on an object, a processed data is obtained by carrying out calculations to the gradated data, and a reference data for use in a comparison with a sensed data obtained by image-picking up a pattern formed on the object is obtained based on the processed data, the method comprising carrying out a first calculation including a predetermined parameter to a value of an gradated data of a targeted pixel among the pixels to obtain a first processed data, and carrying out a second calculation including a predetermined parameter to the values of the gradated data of the targeted pixel and pixels located at the periphery of the targeted pixel to obtain a second processed data.
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