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REFERENCE DATA GENERATION METHOD, PATTERN DEFECT INSPECTION DEVICE, PATTERN DEFECT INSPECTION METHOD, AND REFERENCE DATA GENERATION PROGRAM

机译：参考数据生成方法，图案缺陷检查装置，图案缺陷检查方法和参考数据生成程序

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摘要

PPROBLEM TO BE SOLVED: To generate accurate reference data having a high degree of consistency with sensor data in a short operation time, and to improve inspection accuracy. PSOLUTION: This pattern defect inspection device for inspecting a pattern defect is operated as follows: binary or multi-value gradation data of a pixel unit are generated from design data; the gradation value of an aimed pixel in the gradation data is multiplied by the first coefficient corresponding to the gradation value of a near pixel to the aimed pixel to generate the first processing data; the gradation value of a pixel in the first processing data is rounded up by the first threshold to generate the second processing data; the gradation value of a pixel in the second processing data is rounded off by the second threshold to generate the third processing data; the gradation value of a pixel in the third processing data is multiplied by the second coefficient to generate the fourth processing data; and reference data based on the fourth processing data is compared with the sensor data acquired by imaging the pattern. PCOPYRIGHT: (C)2005,JPO&NCIPI

机译：

要解决的问题：在短时间内生成与传感器数据高度一致的准确参考数据，并提高检查精度。

解决方案：该用于检查图案缺陷的图案缺陷检查装置的操作如下：从设计数据生成像素单元的二进制或多值灰度数据;将该灰度数据中的目标像素的灰度值乘以与该目标像素附近像素的灰度值对应的第一系数，生成第一处理数据;将第一处理数据中的像素的灰度值向上舍入第一阈值以生成第二处理数据;将第二处理数据中的像素的灰度值舍入第二阈值以产生第三处理数据;将第三处理数据中的像素的灰度值乘以第二系数以生成第四处理数据;将基于第四处理数据的参考数据与通过对图案成像而获取的传感器数据进行比较。

版权：（C）2005，JPO＆NCIPI 展开▼

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公开/公告号JP2005195403A

专利类型
公开/公告日2005-07-21

原文格式PDF
申请/专利权人 TOSHIBA CORP;
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申请/专利号JP20040000516
发明设计人 YOSHIKAWA RYOJI;WATANABE HIDEHIRO;
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申请日2004-01-05
分类号G01B11/30;G06T1/00;G06T5/00;G06T5/50;
国家 JP
入库时间 2022-08-21 22:34:29

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