首页> 外国专利> Ultra-thin channel device with raised source and drain and solid source extension doping

Ultra-thin channel device with raised source and drain and solid source extension doping

机译:具有超薄的源极和漏极以及固态源极扩展掺杂的超薄沟道器件

摘要

The inventive method for forming thin channel MOSFETS comprises: providing a structure including at least a substrate having a layer of semiconducting material atop an insulating layer and a gate region formed atop the layer of semiconducting material; forming a conformal oxide film atop the structure; implanting the conformal oxide film; forming a set of spacers atop the conformal oxide film, said set of sidewall spacers are adjacent to the gate region; removing portions of the oxide film, not protected by the set of spacers to expose a region of the semiconducting material; forming raised source/drain regions on the exposed region of the semiconducting material; implanting the raised source/drain regions with a second dopant impurity to form a second dopant impurity region; and annealing a final structure to provide a thin channel MOSFET.
机译:本发明的用于形成薄沟道MOSFET的方法包括:提供一种结构,该结构至少包括至少一个衬底,该衬底具有在绝缘层上方的半导体材料层和在该半导体材料层上方形成的栅极区域。在结构的顶部形成保形氧化膜;植入保形氧化膜;在该共形氧化膜上形成一组隔离物,该组侧壁隔离物与栅极区相邻。去除氧化膜的未被该组隔离物保护的部分,以暴露半导体材料的区域;在半导体材料的暴露区域上形成凸起的源极/漏极区域;用第二掺杂杂质注入凸起的源/漏区以形成第二掺杂杂质区;退火最终结构以提供薄沟道MOSFET。

著录项

  • 公开/公告号US7271446B2

    专利类型

  • 公开/公告日2007-09-18

    原文格式PDF

  • 申请/专利权人 OMER H. DOKUMACI;BRUCE B. DORIS;

    申请/专利号US20040916814

  • 发明设计人 OMER H. DOKUMACI;BRUCE B. DORIS;

    申请日2004-08-12

  • 分类号H01L27/01;

  • 国家 US

  • 入库时间 2022-08-21 21:02:52

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号