首页> 外国专利> PRODUCTION METHOD FOR SILICON NANOWIRE USING POROUS GLASS TEMPLATE, AND ELEMENT INCLUDING SILICON NANOWIRE FORMED THEREBY

PRODUCTION METHOD FOR SILICON NANOWIRE USING POROUS GLASS TEMPLATE, AND ELEMENT INCLUDING SILICON NANOWIRE FORMED THEREBY

机译:利用多孔玻璃模板生产硅纳米粉的方法及其所组成的硅纳米粉

摘要

PPROBLEM TO BE SOLVED: To provide a production method for a silicon nanowire allowing easy materialization of an element and allowing improvement of efficiency by a structure, and to provide the element including the silicon nanowire formed thereby. PSOLUTION: This production method for the silicon nanowire includes: a stage for doping erbium or an erbium precursor into a porous glass template including a plurality of wire-like pores; a stage for disposing the glass template doped with erbium or the erbium precursor on a substrate formed with a metal catalyst layer such that one-side opening parts of the wire-like pores face the metal catalyst layer; and a stage for forming and growing the silicon nanowire along the pore inside the glass template. PCOPYRIGHT: (C)2008,JPO&INPIT
机译:<解决的问题:提供一种用于硅纳米线的制造方法,该方法能够容易地实现元件的材料化并通过结构提高效率,并且提供包括由此形成的硅纳米线的元件。

解决方案:该用于硅纳米线的生产方法包括:将stage或or前体掺杂到具有多个线状孔的多孔玻璃模板中的阶段;步骤:将掺杂有or或the前体的玻璃模板放置在形成有金属催化剂层的基板上,以使线状孔的一侧开口部分面对金属催化剂层;以及沿着玻璃模板内部的孔形成和生长硅纳米线的阶段。

版权:(C)2008,日本特许厅&INPIT

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