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Raw material solution, ferroelectric film, method for manufacturing ferroelectric film, piezoelectric element, piezoelectric actuator, ink jet recording head, and ink jet printer
Raw material solution, ferroelectric film, method for manufacturing ferroelectric film, piezoelectric element, piezoelectric actuator, ink jet recording head, and ink jet printer
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机译:原料溶液,铁电膜,铁电膜的制造方法,压电元件,压电致动器,喷墨记录头和喷墨打印机
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摘要
By designing the structure of ferroelectric constituting elements in a raw material solution for a ferroelectric thin film, the crystallization temperature is lowered. A raw material solution forms the ferroelectric shown by a general formula of ABO3, and includes a sol-gel raw material, and a MOD raw material having a stoichiometric composition of at least an element B that is identical with the sol-gel raw material.
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