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Particle size measurement method of the metal inclusions in by the light emission spectrum strength of the metal inclusions in the constituent elements, and the particle size distribution method of creating metal inclusions, as well as an apparatus for performing the method
Particle size measurement method of the metal inclusions in by the light emission spectrum strength of the metal inclusions in the constituent elements, and the particle size distribution method of creating metal inclusions, as well as an apparatus for performing the method
Measuring the particle size of the metal inclusions in the master electron probe micro analyzer scans the area φ5mm at any location on the surface of the master, based on the particle size of the metal inclusions in the measured, metal Chukai and a calibration curve showing the relationship between the particle size of the metal inclusions to the emission spectrum intensity of the element constituting the stationary object, based on the data of the emission spectrum intensity of the elements present in the light-emitting spots on the surface of the measurement sample, Identify the metal inclusions present in the luminescent spots, to measure the particle size of the metal inclusions have been identified on the basis of the data of the emission spectrum intensity and a calibration curve prepared and.
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