首页> 外国专利> BEDDING SPECIMEN FOR TRANSMISSION ELECTRON MICROSCOPE OBSERVATION, TRANSMISSION ELECTRON MICROSCOPE MEASURING METHOD, AND TRANSMISSION ELECTRON MICROSCOPE DEVICE

BEDDING SPECIMEN FOR TRANSMISSION ELECTRON MICROSCOPE OBSERVATION, TRANSMISSION ELECTRON MICROSCOPE MEASURING METHOD, AND TRANSMISSION ELECTRON MICROSCOPE DEVICE

机译:透射电子显微镜观察的标本,透射电子显微镜的测量方法及透射电子显微镜的装置

摘要

PROBLEM TO BE SOLVED: To perform TEM observation simply with high accuracy.;SOLUTION: A transmission electron microscope observation specimen 10 has a transmission electron microscope measuring object 12 formed in its partial area, the area being formed on a columnar projection part and having a width capable of transmitting an electron beam of a transmission electron microscope. The specimen 10 is worked so as to fit into a holder of the microscope. The worked specimen is brought in an enclosure of the microscope. An electron beam is inlet thereinto from a lateral direction in the partial area of the specimen, thereby obtaining a transmission electron microscope image.;COPYRIGHT: (C)2005,JPO&NCIPI
机译:解决的问题:仅以高精度简单地进行TEM观察。解决方案:透射电子显微镜观察样本10在其局部区域形成有透射电子显微镜测量对象12,该区域形成在柱状突出部上并具有能够透射透射电子显微镜的电子束的宽度。对样本10进行加工以使其适合于显微镜的支架。将工作样品放入显微镜的外壳中。电子束从横向进入样品的局部区域,从而获得透射电子显微镜图像。;版权所有:(C)2005,JPO&NCIPI

著录项

  • 公开/公告号JP2004286486A

    专利类型

  • 公开/公告日2004-10-14

    原文格式PDF

  • 申请/专利权人 TOSHIBA CORP;

    申请/专利号JP20030076357

  • 发明设计人 TAKASHIMA AKIRA;KAMATA YOSHIKI;

    申请日2003-03-19

  • 分类号G01N1/28;H01J37/20;H01J37/26;

  • 国家 JP

  • 入库时间 2022-08-21 23:36:13

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