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BEDDING SPECIMEN FOR TRANSMISSION ELECTRON MICROSCOPE OBSERVATION, TRANSMISSION ELECTRON MICROSCOPE MEASURING METHOD, AND TRANSMISSION ELECTRON MICROSCOPE DEVICE
BEDDING SPECIMEN FOR TRANSMISSION ELECTRON MICROSCOPE OBSERVATION, TRANSMISSION ELECTRON MICROSCOPE MEASURING METHOD, AND TRANSMISSION ELECTRON MICROSCOPE DEVICE
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机译:透射电子显微镜观察的标本,透射电子显微镜的测量方法及透射电子显微镜的装置
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摘要
PROBLEM TO BE SOLVED: To perform TEM observation simply with high accuracy.;SOLUTION: A transmission electron microscope observation specimen 10 has a transmission electron microscope measuring object 12 formed in its partial area, the area being formed on a columnar projection part and having a width capable of transmitting an electron beam of a transmission electron microscope. The specimen 10 is worked so as to fit into a holder of the microscope. The worked specimen is brought in an enclosure of the microscope. An electron beam is inlet thereinto from a lateral direction in the partial area of the specimen, thereby obtaining a transmission electron microscope image.;COPYRIGHT: (C)2005,JPO&NCIPI
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