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Growth of GaN on sapphire with MSE grown buffer layer
Growth of GaN on sapphire with MSE grown buffer layer
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机译:使用MSE生长的缓冲层在蓝宝石上生长GaN
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摘要
A method of fabricating a gallium nitride or like epilayer on sapphire is disclosed wherein a buffer layer is grown on the sapphire substrate by magnetron sputter epitaxy (MSE); and then the gallium nitride epilayer is formed on the buffer layer, preferably by molecular beam epitaxy.
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