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GROWTH OF GAN ON SAPPHIRE WITH MSE GROWN BUFFER LAYER
GROWTH OF GAN ON SAPPHIRE WITH MSE GROWN BUFFER LAYER
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机译:带有MSE增长缓冲区的蓝宝石上GAN的生长
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摘要
A method of fabricating a gallium nitride or like epilayer on sapphire is disclosed wherein a buffer layer is grown on the sapphire substrate by magnetron sputter epitaxy (MSE); and then the gallium nitride epilayer is formed on the buffer layer, preferably by molecular beam epitaxy.
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