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- IMPROVING MULTI-CHIP MODULE TESTABILITY USING POLED-POLYMER INTERLAYER DIELECTRICS

机译:-利用POLED-聚合物层间介电层改善多芯片模块的可测试性

摘要

The present invention improves multi-chip module (MCM) inspection by using new techniques to detect electric field strength in a substrate. In order to probe an MCM structure fabricated by providing polarized polyimide dielectric interlayers and a thin film metallization layer on a silicon carrier, the invention uses a non-invasive laser-based mechanism. The electrical, mechanical, and optical properties of the electro-optic dielectric layer are determined so that the electro-optic material suitable for laser probing and the effect of polarization and processing operations on the effectiveness of the polyimide as a dielectric layer can be investigated.
机译:本发明通过使用检测衬底中的电场强度的新技术来改进多芯片模块(MCM)检查。为了探测通过在硅载体上提供极化的聚酰亚胺介电中间层和薄膜金属化层而制造的MCM结构,本发明使用基于非侵入性激光的机制。确定电光介电层的电,机械和光学特性,以便可以研究适用于激光探测的电光材料以及偏振和加工操作对聚酰亚胺作为电介质层有效性的影响。

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