- IMPROVING MULTI-CHIP MODULE TESTABILITY USING POLED-POLYMER INTERLAYER DIELECTRICS
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机译:-利用POLED-聚合物层间介电层改善多芯片模块的可测试性
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摘要
The present invention improves multi-chip module (MCM) inspection by using new techniques to detect electric field strength in a substrate. In order to probe an MCM structure fabricated by providing polarized polyimide dielectric interlayers and a thin film metallization layer on a silicon carrier, the invention uses a non-invasive laser-based mechanism. The electrical, mechanical, and optical properties of the electro-optic dielectric layer are determined so that the electro-optic material suitable for laser probing and the effect of polarization and processing operations on the effectiveness of the polyimide as a dielectric layer can be investigated.
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