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METHODS FOR MEASURING 3-D THICKNESS PROFILE AND REFRACTIVE INDEX OF TRANSPARENT THIN FILM BY USING WHILE-LIGHT SCANNING INTERFEROMETRY AND RECORDING MEDIUM THEREOF
METHODS FOR MEASURING 3-D THICKNESS PROFILE AND REFRACTIVE INDEX OF TRANSPARENT THIN FILM BY USING WHILE-LIGHT SCANNING INTERFEROMETRY AND RECORDING MEDIUM THEREOF
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机译：利用全光扫描干涉测量及其记录介质来测量透明薄膜的3-D厚度轮廓和折射率的方法
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摘要
PURPOSE: Methods for measuring a 3-D thickness profile and a refractive index of a transparent thin film by white-light scanning interferometry and a recording medium thereof are provided to precisely measure a 3-D thickness profile and a thickness value of a transparent thin film at any position. CONSTITUTION: A method for measuring a 3-D thickness profile of a transparent thin film by white-light scanning interferometry includes the steps of computing a phase graph by performing a fourier transform after obtaining an interference signal(S1302), modeling objects to measure and computing a mathematical phase graph from the modeling results(S1303), and measuring profile and thickness values by setting an error function using the phase values obtained in the first and second steps and applying an optimization technique(S1304-S1308).
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