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Method for manufacturing indium gallium arsenide / gallium arsenide quantum wire

机译:砷化铟镓/砷化镓量子线的制造方法

摘要

The present invention provides a quantum wire structure capable of vertically laminating indium gallium arsenide (InGaAs) / gallium arsenide (GaAs) quantum wires to increase quantum efficiency. According to the method of manufacturing a quantum wire according to the present invention, a gallium arsenide barrier layer is formed under a process condition in which a V-groove having a sharp shape is formed on a gallium arsenide substrate on which a V-groove is formed, The active layer of indium gallium arsenide is grown alternately a plurality of times to produce quantum wires. The quantum wire formed by the lamination structure of indium gallium arsenide (InGaAs) / gallium arsenide (GaAs) by the above method has a strain due to lattice mismatching, and has excellent characteristics due to the strain effect in the fabrication of the quantum wire laser.
机译:本发明提供了一种量子线结构,其能够垂直层叠砷化铟镓(InGaAs)/砷化镓(GaAs)量子线以增加量子效率。根据本发明的制造量子线的方法,在其中在其上形成V形沟槽的砷化镓衬底上形成具有尖锐形状的V形沟槽的工艺条件下,形成砷化镓阻挡层。形成后,砷化铟镓的活性层交替生长多次以产生量子线。通过上述方法由砷化铟镓(InGaAs)/砷化镓(GaAs)的层压结构形成的量子线由于晶格失配而具有应变,并且由于在量子线激光器的制造中的应变效应而具有优异的特性。 。

著录项

  • 公开/公告号KR19990042428A

    专利类型

  • 公开/公告日1999-06-15

    原文格式PDF

  • 申请/专利权人 정선종;

    申请/专利号KR19970063248

  • 发明设计人 김성복;노정래;이일항;

    申请日1997-11-26

  • 分类号H01L21/027;

  • 国家 KR

  • 入库时间 2022-08-22 02:17:14

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