Carbon-free hydrogen silsesquioxane with dielectric constant less than 3. 2 annealed in hydrogen for integrated circuits

• 1. 栅极第一高介电常数金属栅极堆栈上无氧的快速热退火 [P] . 中国专利： CN103730423A . 2014-04-16
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• 3. Process to provide enhanced resistance to cracking and to further reduce the dielectric constant of a low dielectric constant dielectric film of an integrated circuit structure by implantation with hydrogen ions [P] . 美国专利： US6346488B1 . 2002-02-12

  机译： 通过注入氢离子来提供增强的抗裂性并进一步降低集成电路结构的低介电常数介电膜的介电常数的方法

• 4. FLUID OXIDE BASED ON HYDROGEN SILSESQUIOXANE AS AN ELEMENT IN INTERMEDIATE LEVEL DIELECTRIC FOR ULSI CIRCUIT IN 0.5 OR LESS [P] . 日本专利： JPH08255834A . 1996-10-01

  机译： 基于氢硅倍半氧烷的液态氧化物，用于0.5或更低水平的ULSI电路中级介质中的元素

• 5. Hydrogen silsesquioxane thin films for low capacitance structures in integrated circuits [P] . 美国专利： US6114186A . 2000-09-05

  机译： 氢倍半硅氧烷氢薄膜，用于集成电路中的低电容结构

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• 4. STRUCTURAL AND ELECTRICAL CHARACTERISTICS OF LOW-DIELECTRIC CONSTANT POROUS HYDROGEN SILSESQUIOXANE FOR CU METALLIZATION [C] . J. H. Wang, P. T. Liu, T. C. Chang, Proceedings vol.2003-13; International Symposium on Thin Film Materials, Process, and Reliability: Plasma Processing for the 100 nm Node and Copper Interconnects with Low-k Inter-Level Dielectric Films and Electrochemical Society, Inc. Meeting; 20030427- . 2003
• 5. 1. Development of hot-melt pan-coating, application to sustained-release capsules and tamper resistant-coating. 2. Formulation of verapamil hydrogen chloride and diltiazem hydrogen chloride semisolid matrix capsules. 3. Novel sustained release tablet of glipizide: Compression of coated drug beads, formulation, dissolution, and convolution. 4. Verapamil sustained release: New formulation and convolution. [D] . Nguyen, Chien Ngoc. 2006
• 6. The Dielectric Constant of Atomic Hydrogen in Undulatory Mechanics [O] . Paul S. Epstein 1927
• 7. Thick film hydrogen silsesquioxane planarization for passive component technology associated with electronic-photonic integrated circuits [O] . Ali Al-Moathin, Lianping Hou, Afesomeh Ofiare, 2019

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