首页> 外国专利> By means of a laser plasma deposition of diamond-like carbon material produced.

By means of a laser plasma deposition of diamond-like carbon material produced.

机译:通过激光等离子体沉积产生类金刚石碳材料。

摘要

A method and apparatus are disclosed for producing amorphic or ultra fine-grained, diamond-like material on a substrate. Uniform, high quality dehydrogenated diamond-like material is produced when a hardened target material is used and/or when a laser beam strikes the target at non-perpendicular angles of incidence. Also, selective placement of particles upon a substrate as well as simultaneous cleaning of the substrate is achieved by a secondary electrode placed within the laser beam path of travel between a first electrode and the substrate.
机译:公开了一种用于在基板上生产非晶或超细晶粒的类金刚石材料的方法和设备。当使用硬化的靶材和/或激光束以非垂直入射角撞击靶材时,会产生均匀,高质量的脱氢金刚石状材料。而且,通过将第二电极放置在第一电极和基板之间的激光束传播路径内,可以实现将微粒选择性地放置在基板上以及同时清洁基板。

著录项

  • 公开/公告号DE69103144T2

    专利类型

  • 公开/公告日1994-11-03

    原文格式PDF

  • 申请/专利权人 UNIV TEXAS US;

    申请/专利号DE1991603144T

  • 发明设计人 COLLINS CARL B US;DAVANLOO FARZIN US;

    申请日1991-05-08

  • 分类号C23C14/06;C23C14/28;

  • 国家 DE

  • 入库时间 2022-08-22 04:34:48

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号