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By means of a laser plasma deposition of diamond-like carbon material produced.
By means of a laser plasma deposition of diamond-like carbon material produced.
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机译:通过激光等离子体沉积产生类金刚石碳材料。
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摘要
A method and apparatus are disclosed for producing amorphic or ultra fine-grained, diamond-like material on a substrate. Uniform, high quality dehydrogenated diamond-like material is produced when a hardened target material is used and/or when a laser beam strikes the target at non-perpendicular angles of incidence. Also, selective placement of particles upon a substrate as well as simultaneous cleaning of the substrate is achieved by a secondary electrode placed within the laser beam path of travel between a first electrode and the substrate.
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