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DIAMOND-LIKE CARBON MATERIAL PRODUCED BY LASER PLASMA DEPOSITION

机译:激光等离子体沉积制得的类金刚石碳材料

摘要

Method and apparatus for producing an amorphous material or an ultra-fine-grained diamond-like on a substrate. Producing a uniform dehydrogenated material like high quality diamond when using a cured target material and / or when a laser beam strikes the target at non-perpendicular angles of incidence. Moreover, one manages to obtain selective introduction of particles onto a substrate and a simultaneous cleaning by means of a secondary electrode placed in the path of travel of the laser beam between a first electrode and the substrate .
机译:在基材上生产非晶态材料或超细晶粒类金刚石的方法和设备。当使用固化的靶材和/或激光束以非垂直入射角撞击靶材时,会产生均匀的脱氢材料,例如高质量的金刚石。而且,人们设法通过放置在第二电极在第一电极和基底之间的激光的行进路径中的第二电极来选择性地将粒子引入到基底上并且同时进行清洁。

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