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DIAMOND-LIKE CARBON MATERIAL PRODUCED BY LASER PLASMA DEPOSITION
DIAMOND-LIKE CARBON MATERIAL PRODUCED BY LASER PLASMA DEPOSITION
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机译:激光等离子体沉积制得的类金刚石碳材料
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摘要
Method and apparatus for producing an amorphous material or an ultra-fine-grained diamond-like on a substrate. Producing a uniform dehydrogenated material like high quality diamond when using a cured target material and / or when a laser beam strikes the target at non-perpendicular angles of incidence. Moreover, one manages to obtain selective introduction of particles onto a substrate and a simultaneous cleaning by means of a secondary electrode placed in the path of travel of the laser beam between a first electrode and the substrate .
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