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The analyzer by ellipsometry, the method of analysis ellipsometry of a sample and the application to the extent of variation of thickness of the thin layers
The analyzer by ellipsometry, the method of analysis ellipsometry of a sample and the application to the extent of variation of thickness of the thin layers
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机译:椭圆偏光分析仪,样品椭圆偏光分析方法及薄层厚度变化程度的应用
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摘要
For analyzing samples e by ellipsometry, and method of analysis. / p & & p & the light beam f passes through a polarizer 4, a birefringent plate 5, rotating omega and a light-flux analyzer 6. The measurement is used for the harmonics two and four of the speed of rotation of the blade 5. / p & & p & application in particular to the growth and the etching of thin layers.
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