Making doped epitaxial germanium layers with defined - reproducible electrical properties

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  机译： 一种具有确定的可复制电性能的掺杂外延锗层的生产方法

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  机译： 制备外延硅锗层的方法和包括外延砷原位掺杂的硅锗层的集成半导体器件

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  机译： 制备外延锗硅锗外延硅层和集成半导体器件的方法。

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