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Compensation Chamber and Process Effects to Improve Critical Dimension Variation for Trimming Process
Compensation Chamber and Process Effects to Improve Critical Dimension Variation for Trimming Process
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机译：补偿室和工艺效果，提高修剪过程的关键尺寸变化
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摘要
The controller includes a memory for storing data that correlates the accumulated values to respective adjustment factors. The accumulation values correspond to the accumulation of material on the surfaces in the processing chamber and each of the adjustment factors corresponds to an adjustment to a control parameter of the RF power provided to the processing chamber. The accumulation calculation module is configured to calculate a first accumulation value representing an accumulation amount of the material. The RF power control module receives the first accumulated value, receives at least one of the setpoint power and the duration of the etching step, retrieves the stored data from the memory, and retrieves the first accumulated value, the setpoint power and the duration of the etching step. At least one of and adjusting the control parameter based on the stored data, and controlling the RF power provided to the processing chamber according to the adjusted control parameter.
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