首页> 外国专利> METHOD OF MANUFACTURE OF A CAPILLARY FOR A HOLLOW-CORE PHOTONIC CRYSTAL FIBER

METHOD OF MANUFACTURE OF A CAPILLARY FOR A HOLLOW-CORE PHOTONIC CRYSTAL FIBER

机译:用于中空芯光子晶体纤维的毛细管制造方法

摘要

Disclosed is a method for manufacturing a capillary usable as part of a hollow-core photonic crystal fiber. The method comprises obtaining a capillary having capillary wall comprising a first wall thickness; and chemically etching the capillary walls to reduce the wall thickness of the capillary wall. During performance of said etching step a control parameter is locally varied along the length of the capillary, the control parameter relating to reactivity of an etchant used in the etching step, so as to control the etched wall thickness of the capillary wall along the capillary length. Also disclosed is a capillary manufactured to such a method and various devices comprising such a capillary.
机译:公开了一种用于制造可用作中空核心光子晶体纤维的一部分的毛细管的方法。该方法包括获得具有包含第一壁厚的毛细壁的毛细管;并在化学蚀刻毛细管壁以减小毛细壁的壁厚。在所述蚀刻步骤的性能期间,控制参数沿毛细管的长度局部变化,该控制参数与蚀刻步骤中使用的蚀刻剂的反应性有关,以控制沿毛细管长度的毛细壁的蚀刻壁厚。还公开了一种制造成这种方法的毛细管和包括这种毛细管的各种装置。

著录项

  • 公开/公告号EP3819266A1

    专利类型

  • 公开/公告日2021-05-12

    原文格式PDF

  • 申请/专利权人 ASML NETHERLANDS B.V.;

    申请/专利号EP20190207624

  • 发明设计人 SABERT HENDRIK;

    申请日2019-11-07

  • 分类号C03B37/012;C03B37/027;C03C15;C03C25/68;G02B5;

  • 国家 EP

  • 入库时间 2022-08-24 18:39:21

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