首页> 外国专利> Methods of controlling the operation of probe stations and probe stations that perform the methods, the methods including generating and executing a test routine that directs the probe station to electrically test a test subset of a plurality of DUTs and to pre-test a pre-test subset of a plurality of DUTs, which is a subset of the test subset, with a pre-test

Methods of controlling the operation of probe stations and probe stations that perform the methods, the methods including generating and executing a test routine that directs the probe station to electrically test a test subset of a plurality of DUTs and to pre-test a pre-test subset of a plurality of DUTs, which is a subset of the test subset, with a pre-test

机译：控制执行方法的探针站和探针站的操作的方法，该方法包括产生和执行测试程序，该测试程序指示探头站电动测试多个DUT的测试子集并进行预先测试多个DUT的子集，这是测试子集的子集，具有预测试

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摘要

Methods of controlling the operation of probe stations and probe stations that perform the methods. The methods including generating a test routine by constructing a substrate map, receiving a test subset input from a user, and updating the substrate map to incorporate information regarding which devices under test (DUTS) of a plurality of DUTs are in a test subset of a plurality of DUTs. The methods also include receiving a pre-test subset input from the user, wherein the pre-test subset is a subset of the test subset, and updating the substrate map to incorporate information which DUTs of the test subset are in the pre-test subset. The methods further include executing the test routine by moving a probe assembly to each DUT in the test subset, selectively performing a pre-test routine on each DUT that is in the pre-test subset, and electrically testing each DUT in the test subset.

机译：控制执行方法的探针站的操作的方法。包括通过构造基板图来生成测试程序的方法，接收来自用户的测试子集，以及更新基板图以结合关于多个DUT的测试（DUT）的设备（DUT）的信息是A的测试子集。多个DUT。该方法还包括接收来自用户的预测试子集输入，其中预测试子集是测试子集的子集，并且更新基板映射以结合测试子集的DUT在预测试子集中的信息。该方法还包括通过将探测组件移动到测试子集中的每个DUT来执行测试程序，在测试子集中选择性地在每个DUT上执行预测试程序，并在测试子集中电测试每个DUT。

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公开/公告号US11016121B2

专利类型
公开/公告日2021-05-25

原文格式PDF
申请/专利权人 FORMFACTOR INC.;
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申请/专利号US201916421173
发明设计人 SIA CHOON BENG;DAVID RANDLE HESS;CHUNYI YIN LEONG;
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申请日2019-05-23
分类号G01R1/02;G01R31/26;G01R1/067;G01R1/04;
国家 US
入库时间 2022-08-24 18:53:15

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