SYNTHESIS OF CARBON NANOTUBES BY PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

机译：等离子体增强化学气相沉积法合成碳纳米管

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Preliminary results of the study of carbon nanotubes synthesis by a plasma-enhanced CVD are presented. For the synthesis, low-pressure gas mixtures of acetylene and nitrogen were used. For thin catalyst films (6 run), multi-walled carbon nanotubes with diameters below 100 nm were obtained. The samples were analysed using high-resolution scanning electron microscope (SEM). The analysis of the SEM images suggests the tip-growth mechanism.

机译：提出了通过等离子体增强CVD合成碳纳米管的研究的初步结果。对于合成，使用乙炔和氮气的低压气体混合物。对于薄催化剂膜（6行程），获得了直径小于100 nm的多壁碳纳米管。使用高分辨率扫描电子显微镜（SEM）分析样品。 SEM图像的分析表明尖端生长机理。

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《18th Symposium on Microelectronics Technology and Devices; 16th Symposium on Integrated Circuits and System Design; Sep 8-11, 2003; Sao Paulo, Brazil》|2003年|p.311-315|共5页
会议地点 Sao Paulo(BR);Sao Paulo(BR);Sao Paulo(BR);Sao Paulo(BR)
作者
S.A. Moshkalyov; A.C.S. Ramos; C. Reyes-Betanzo; J.W. Swart;
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作者单位

Centro de Componentes Semicondutores -CCS, UNICAMP, C.P. 6061, CEP 13083-970, Campinas, SP, Brasil;

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会议组织
原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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机译：等离子体增强热丝化学气相沉积制备高取向碳纳米管;应用物理快报

SYNTHESIS OF CARBON NANOTUBES BY PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

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