COMB-SHAPE MICRORESONATORS MODELING FOR MICROELECTROMECHANICAL FILTER SYNTHESIS

机译：微机电过滤器合成的梳形微谐振器建模

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This work presents a mechanical behavior modeling of comb-drive structures used in microelectromechanical filter applications. The mechanical behavior was approximated through simple expressions obtained through matrices structural analysis for stiffness. Estimates of the fundamental frequency have been obtained in order to improve the MEMS CAD tools for filter synthesis, in development by our research team.

机译：这项工作提出了在微机电滤波器应用中使用的梳齿驱动结构的机械行为模型。力学性能是通过矩阵结构分析刚度获得的简单表达式近似得出的。由我们的研究团队在开发中，已经获得了基本频率的估计值，以便改进用于滤波器合成的MEMS CAD工具。

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《18th Symposium on Microelectronics Technology and Devices; 16th Symposium on Integrated Circuits and System Design; Sep 8-11, 2003; Sao Paulo, Brazil》|2003年|p.233-240|共8页
会议地点 Sao Paulo(BR);Sao Paulo(BR);Sao Paulo(BR);Sao Paulo(BR)
作者
Jakson M. Vassoler; Jun S. O. Fonseca; Ignacio Iturrioz; Renato P. Ribas;
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作者单位

Departamento de Engenharia Mecanica -DEMEC CEP 90040-020 -Porto Alegre, RS -Brasil;

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原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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COMB-SHAPE MICRORESONATORS MODELING FOR MICROELECTROMECHANICAL FILTER SYNTHESIS

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