HEAT TRANSFER IN A MEMS FOR DETERMINATION OF FLUID AND FLOW CHARACTERISTICS

机译：MEMS中的传热，用于确定流体和流动特性

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The paper presents an one-dimensional model for the heat transfer in a limited but significant zone of an actuator-sensor structure for the determination of fluid and flow characteristics. As an essential step for the designing process of this structure, the usefulness of the model in the framework of the structure's functionality is underlined. The main heat transfer mechanisms are detailed by qualitative and quantitative evaluations. Finally we compare the data obtained by simulating this model with he experimental data. The modeling errors are discussed. The achieved results might be used directly or adapted for various thermal based sensors for flow measurement both in micro and macro world.

机译：本文提出了一种用于确定流体和流动特性的致动器传感器结构的有限但重要区域中的热传递的一维模型。作为该结构设计过程的必要步骤，强调了该模型在结构功能框架中的有用性。主要的传热机制通过定性和定量评估进行了详细说明。最后，我们将通过模拟该模型获得的数据与实验数据进行比较。讨论了建模错误。所获得的结果可以直接使用，也可以适用于在微观和宏观世界中用于各种流量测量的基于热的传感器。

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《The 2001 ASME International Mechanical Engineering Congress and Exposition, 2001, Nov 11-16, 2001, New York, New York》|2001年|p.375-380|共6页
会议地点 New York NY(US);New York NY(US)
作者
Nicolae Damean; Paul P.L. Regtien;
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作者单位

University of Twente, EL / Ml, P.O. Box 217, 7500 AE Enschede, The Netherlands;

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会议组织
原文格式 PDF
正文语种 eng
中图分类电工技术;
关键词
actuator-sensor structure; one-dimensional model; heat transfer; fluid flow;

机译：执行器-传感器结构；一维模型；传播热量;流体流量;

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HEAT TRANSFER IN A MEMS FOR DETERMINATION OF FLUID AND FLOW CHARACTERISTICS

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