Stability of Charge-Controlled Electrostatic Actuators: A general theorem and a novel charge Pull-In extraction numerical scheme

机译：电荷控制静电致动器的稳定性：一个一般性定理和一个新颖的电荷引入提取数值方案

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This work deals with the stability of charge-controlled electrostatic actuators. First, a general proof is presented showing that for any electrostatic actuator, the stability range under charge-control is always larger than the stability range under voltage-control. Second, a novel numerical scheme for analyzing the stability and extracting the charge Pull-In parameters of charge-controlled actuators is proposed. Third, a strategy for further extending the travel-range of charge-controlled actuators is suggested.

机译：这项工作涉及电荷控制静电致动器的稳定性。首先，提出了一个一般性证明，表明对于任何静电致动器，电荷控制下的稳定范围始终大于电压控制下的稳定范围。其次，提出了一种新的数值方案，用于分析稳定性和提取电荷控制致动器的电荷引入参数。第三，提出了进一步扩展电荷控制致动器的行程范围的策略。

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来源
《2003 Nanotechnology Conference and Trade Show Nanotech 2003 Vol.1 Feb 23-27, 2003 California, USA》|2003年|p.308-311|共4页
会议地点 San Francisco CA(US);San Francisco CA(US);San Francisco CA(US);San Francisco CA(US);San Francisco CA(US);San Francisco CA(US);San Francisco CA(US);San Francisco CA(US)
作者
Ofir Bochobza-Degani; David Elata; Yael Nemirovsly;
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作者单位

Electrical Engineering Department, Technion -Israel Institute of Technology, Haifa, 32000, Israel;

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会议组织
原文格式 PDF
正文语种 eng
中图分类一般工业技术;
关键词
charge control; pull-in; electrostatic actuator; numerical scheme;

机译：电荷控制;拉入;静电执行器;数值方案;

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专利

1. Analytical approach and numerical /spl alpha/-lines method for pull-in hyper-surface extraction of electrostatic actuators with multiple uncoupled voltage sources [J] . Elata D., Bochobza-Degani O., Nemirovsky Y. Journal of Microelectromechanical Systems . 2003,第5期

机译：带有多个未耦合电压源的静电执行器的超表面抽取的解析方法和数值/ spl alpha /线法
2. Analytical modeling of the effects of electrostatic actuation and casimir force on the pull-in instability and static behavior of torsional nano/micro actuators [J] . Moeenfard H., Darvishian A., Ahmadian M.T. International Journal of Modern Physics, B. Condensed Matter Physics, Statistical Physics, Applied Physics . 2013,第6期

机译：静电激励和卡西米尔力对扭转纳米/微型激励器的拉入不稳定性和静态行为的影响的分析模型
3. Electromechanical stability in charge-controlled dielectric elastomer actuation [J] . Bo Li, Jinxiong Zhou, Hualing Chen Applied Physics Letters . 2011,第24期

机译：电荷控制介电弹性体致动中的机电稳定性
4. Stability of Charge-Controlled Electrostatic Actuators: A general theorem and a novel charge Pull-In extraction numerical scheme [C] . Nanotechnology conference and trade show . 2003

机译：电荷控制静电执行器的稳定性：通用定理和新型电荷拉伸数值方案
5. Effect of space charges on micro- to nanoscale electrostatic actuation. [D] . Wu, Yan. 2005

机译：空间电荷对微米至纳米级静电驱动的影响。
6. Pull-In Effect of Suspended Microchannel Resonator Sensor Subjected to Electrostatic Actuation [O] . Han Yan, Wen-Ming Zhang, Hui-Ming Jiang, 2017

机译：悬浮微通道谐振传感器在静电作用下的吸合效应
7. Quasi-Static Pull-in: an Instability in Electrostatic Actuators [O] . M. S. Al-Ghamdi, M. E. Khater, E. M. Abdel-Rahman, 2020

机译：准静态拉入：静电执行器中的不稳定性

Stability of Charge-Controlled Electrostatic Actuators: A general theorem and a novel charge Pull-In extraction numerical scheme

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