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首页> 外文会议>2012 International Conference on Optical MEMS and Nanophotonics. >Design and fabrication of electrostatically driven in-plane MEMS rotational mirror with electrostatic rotary encoder
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Design and fabrication of electrostatically driven in-plane MEMS rotational mirror with electrostatic rotary encoder

机译：带静电旋转编码器的静电驱动平面MEMS旋转镜的设计与制造

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In this paper, design and fabrication results of ‘in-plane’ type MEMS mirror device driven by rotational electrostatic actuators with angle sensing ability are reported for the first time. This MEMS mirror realizes rotational motion of a vertical mirror mounted on the SOI actuator stage, which can deflect or switch the reflected light angle in parallel to the same chip surface. Since optical fibers and the vertical mirror can be aligned with guide structures or slits fabricated by the same photolithography step, precisely self-aligned micro optical bench system with light deflection function can be easily constructed. In addition, electrostatic rotary encoder is integrated with the rotational actuator for detection of the absolute rotational angle of the mirror stage. The rotational actuator device was fabricated successfully, and ±2.4° stage rotation was obtained at a 96V actuator drive voltage. Also, in-plane optical light deflection has been successfully demonstrated with the rotational mirror put on the actuator.
机译：本文首次报道了具有角度感应功能的旋转静电致动器驱动的“平面”型MEMS反射镜装置的设计和制造结果。该MEMS反射镜实现了安装在SOI致动器平台上的垂直反射镜的旋转运动，该反射镜可以偏转或切换平行于同一芯片表面的反射光角度。由于可以通过相同的光刻步骤将光纤和垂直镜对准引导结构或狭缝，因此可以容易地构造具有光偏转功能的精确自对准的微型光学平台系统。另外，静电旋转编码器与旋转致动器集成在一起，用于检测镜台的绝对旋转角度。成功地制造了旋转致动器装置，并且在96V致动器驱动电压下获得了±2.4°的载物台旋转。同样，通过将旋转镜放置在致动器上，可以成功地证明面内光学偏转。

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