Susceptor coating materials applicable for SiC reactor cleaning

机译：适用于SiC反应器清洁的基座涂层材料

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Summary form only given. The complete presentation was not made available for publication as part of the conference proceedings. In order to develop a cleaning process for the silicon carbide chemical vapor deposition reactor, the susceptor coating materials are developed for protecting the susceptor from the etching by chlorine trifluoride gas. The chlorine trifluoride gas does not cause a serious damage to the pyrolitic carbon film at the temperatures lower than 480 °C, at which temperature the quick and practical reactor cleaning process is expected to be possible.

机译：仅提供摘要表格。完整的演示文稿未作为会议记录的一部分公开发布。为了开发用于碳化硅化学气相沉积反应器的清洁工艺，开发了基座涂层材料以保护基座免受三氟化氯气体的蚀刻。在低于480°C的温度下，三氟化氯气体不会严重破坏热解碳膜，在该温度下，有望实现快速，实用的反应器清洁过程。

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来源
《2016 European Conference on Silicon Carbide amp; Related Materials》|2016年|1-1|共1页
会议地点 Halkidiki(GR)
作者
Kohei Shioda; Hitoshi Habuka; Hideki Ito; Shin-ichi Mitani; Yoshinao Takahashi;
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作者单位

Yokohama National University, 79-5 Tokiwadai Hodogaya Yokohama 240-8501 Japan;

Yokohama National University, 79-5 Tokiwadai Hodogaya Yokohama 240-8501 Japan;

NuFlare Technology, Inc., 8-1 Shinsugita Isogo Yokohama 235-8522 Japan;

NuFlare Technology, Inc., 8-1 Shinsugita Isogo Yokohama 235-8522 Japan;

Kanto Denka Kogyo Co., Ltd, Kanda Awaji-cho Chiyoda Tokyo 101-0063 Japan;

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原文格式 PDF
正文语种 eng
中图分类
关键词
Etching; Silicon carbide; Inductors; Coatings; Cleaning; Carbon; Films;

机译：蚀刻;碳化硅;电感器;涂层;清洁;碳;薄膜;

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1. Susceptor Coating Materials Applicable for SiC Reactor Cleaning [J] . Kohei Shioda, Hitoshi Habuka, Hideki Ito, Materials science forum . 2017,第期

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2. Susceptor-Coating Materials for Growth of 4H-SiC [J] . NASA Tech Briefs . 2000,第4期

机译：用于4H-SiC生长的感受器涂层材料
3. Applicability of Chemical Cleaning Process to Steam Generator Secondary Side, (IV) Comprehensive Applicability Evaluation of Chemical Cleaning and Its Effect on Integrity of Other Structural Materials Other than Steam Generator Tubes [J] . Kazutoshi FUJIWARA, Hirotaka KAWAMURA, Hiromi KANBE, Journal of nuclear science and technology . 2006,第11期

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4. Susceptor coating materials applicable for SiC reactor cleaning [C] . Kohei Shioda, Hitoshi Habuka, Hideki Ito, European Conference on Silicon Carbide Related Materials . 2016

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Susceptor coating materials applicable for SiC reactor cleaning

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