• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>2016 Global Symposium on Millimeter Waves amp; ESA Workshop on Millimetre-Wave Technology and Applications >THz MEMS ¿¿¿ Micromachining enabling new solutions at millimeter and submillimeter frequencies
【24h】

THz MEMS ¿¿¿ Micromachining enabling new solutions at millimeter and submillimeter frequencies

机译：太赫兹MEMS微型加工实现了毫米和亚毫米频率的新解决方案

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Since RF MEMS switches appeared more than 20 years ago, micromechanics has been attracting huge attention for enabling near-ideal microwave devices. MEMS switches and MEMS-switch based circuits have been through different development stages and are currently proving themselves commercially, among others for mobile-phone antenna tuners. However, micromachining can do much more than ¿¿¿just¿¿¿ two-dimensional MEMS switches for planar transmission-line technology: Three-dimensional micromachining allows for new microwave devices with unprecedented performance, and has the potential to become an enabling technology for volume-manufacturable, reconfigurable submillimeter-wave and THz systems. This paper provides an overview of 3D silicon micromachining capability and examples of innovative microwave devices enabled by this technique, including W-band phase shifters, tuneable capacitors and couplers, and near-ideal V-band waveguide switches based on MEMS-tuneable surfaces. Then, the state of the art of micromachined waveguide systems up to 2.9 THz is given, including single components such as micromachined-waveguide filters up to 1 THz, but also very complex systems such as a 340 GHz 8-pixel imaging radar. Finally, the potential of MEMS-tuneable micromachined-waveguide systems is outlined, given the examples of recent work at KTH on THz MEMS devices operating at 500¿¿¿750 GHz, including a 3.3 bit MEMS phase shifter and a waveguide switch.
机译：自20年前RF MEMS开关问世以来，微机械一直吸引着极大的关注，以实现近乎理想的微波设备。 MEMS开关和基于MEMS开关的电路已经经历了不同的发展阶段，并且目前正在商业上证明自己，尤其是针对移动电话天线调谐器。然而，对于平面传输线技术而言，微机械加工的作用远不止于“正义”二维MEMS开关：三维微机械加工使新型微波设备具有空前的性能，并有潜力成为一种实现技术体积可制造，可重构的亚毫米波和太赫兹系统。本文概述了3D硅微加工能力，并举例说明了采用该技术的创新微波设备，包括W波段移相器，可调谐电容器和耦合器，以及基于MEMS可调谐表面的近乎理想的V波段波导开关。然后，给出了高达2.9 THz的微机械波导系统的技术水平，包括单个组件，例如高达1 THz的微机械波导滤波器，还包括非常复杂的系统，例如340 GHz 8像素成像雷达。最后，给出了MEMS可调微加工波导系统的潜力，并给出了KTH在500 GHz 750 GHz频率下运行的THz MEMS器件的最新工作的示例，其中包括3.3位MEMS移相器和波导开关。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号