This paper describes a drive method for a linear motion microsystem and evaluate its fictional property. The linear motion microsystem consists of a micro slider with the dimension of width 327 mumXlength 515 mumX height 450 mum and a guideway, that is made of single crystal silicon, respectively. The mating two V-grooves are anisotropically etched and its opening angle 70.5 degrees can be precisely attained and are applied to the linear motion guide. The V-shaped silicon micro slider is driven by the mechanical vibration system which consists of two voice coil motors in vertical and horizontal directions. The feed rate and the feed direction of the slider can be controlled by changing the phase shift and amplitude ratio between them. The motion of the slider at the constant feed rate, 3-10 mm/s, is realized under the experimental conditions as the drive frequency 1.4 kHz, and the amplitude 1 mum.
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机译：本文描述了线性运动微系统的驱动方法，并评估了其虚构特性。线性运动微系统由尺寸分别为327毫米x长度515毫米x高度450毫米的微型滑块和一个由单晶硅制成的导轨组成。对两个V形槽的配合进行各向异性蚀刻，可以精确地获得其70.5度的张角并将其应用于线性运动导轨。 V形硅微型滑块由机械振动系统驱动，该系统由两个在垂直和水平方向上的音圈电机组成。滑块的进给速度和进给方向可以通过改变它们之间的相移和振幅比来控制。在实验条件下，以1.4 kHz的驱动频率和1μm的振幅实现了滑块在恒定进给速度3-10 mm / s下的运动。
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