This paper describes a drive method for a linear motion microsystem and evaluate its fictional property. The linear motion microsystem consists of a micro slider with the dimension of width 327 mumXlength 515 mumX height 450 mum and a guideway, that is made of single crystal silicon, respectively. The mating two V-grooves are anisotropically etched and its opening angle 70.5 degrees can be precisely attained and are applied to the linear motion guide. The V-shaped silicon micro slider is driven by the mechanical vibration system which consists of two voice coil motors in vertical and horizontal directions. The feed rate and the feed direction of the slider can be controlled by changing the phase shift and amplitude ratio between them. The motion of the slider at the constant feed rate, 3-10 mm/s, is realized under the experimental conditions as the drive frequency 1.4 kHz, and the amplitude 1 mum.
展开▼
