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首页> 外文会议>2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy >Microscopic Formtesting of Large Area Microstructured Surfaces by Means of Formtesting Interferometry
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Microscopic Formtesting of Large Area Microstructured Surfaces by Means of Formtesting Interferometry

机译：大尺寸微结构化表面的显微成型试验

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摘要

By innovative production technologies it is nowadays possible to manufacture large area microstructured surfaces. A new aim for measurement technologies is to cover the process chain during the production of these 3D-nano- and microstructures. At the Fraunhofer IPT the global form of the structures is investigated as it determines the functionality of the components most significantly. Very fast interferometrical large area measurement concepts are developed for the inspection of the surface. The possibilities of interferometrical formtesting of prisms, spherical lens arrays or gratings are adapted to the microscopic range. Especially for the characterisation of the gratings the measurement range has been extended by using multiple wavelength interferometry.
机译：通过创新的生产技术，如今可以制造大面积的微结构化表面。测量技术的新目标是在生产这些3D纳米和微结构的过程中覆盖工艺链。在Fraunhofer IPT，研究了结构的整体形式，因为它最重要地决定了组件的功能。开发了非常快速的干涉测量大面积测量概念来检查表面。棱镜，球面透镜阵列或光栅的干涉式形状测试的可能性适用于微观范围。特别是对于光栅的表征，通过使用多波长干涉测量法已经扩展了测量范围。

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