Fabrication of Micro Hot-Plates with Interdigitated Fingers for Chemical Sensing Applications

机译：带有指状指的微型热板的制造，用于化学传感应用

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This paper describes the fabrication process of a micro hot plate integrated on a silicon chip. The device has been conceived for measurements of various gas, using an interdigitated fingers device covered with various chemical membranes as polymers and metallo-porphyrins.

机译：本文介绍了集成在硅芯片上的微热板的制造过程。该设备已被构想为使用覆盖有各种化学膜（如聚合物和金属卟啉）的叉指式设备测量各种气体。

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《2nd Italian Conference on Sensors and Microsystems Artificial and Natural Perception Rome, Italy 3-5 February 1997》|1997年|p.343-348|共6页
会议地点 Rome(IT)
作者
V.Foglietti; S.Crescentini; S.Petrocco;
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原文格式 PDF
正文语种 eng
中图分类电工技术;
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Fabrication of Micro Hot-Plates with Interdigitated Fingers for Chemical Sensing Applications

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