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首页> 外文会议>4th International spacecraft propulsion conference >ANGULAR PROPERTIES OF Xe+-SPUTTERED MOLYBDENUM AT LOW IMPINGEMENT ENERGY
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ANGULAR PROPERTIES OF Xe+-SPUTTERED MOLYBDENUM AT LOW IMPINGEMENT ENERGY

机译：Xe +溅射钼在低碰撞能量下的角特性

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摘要

The angular properties of sputtered molybdenum have not been previously measured for impinging ions with energy below 1 keV. The 0.2 – 1 keV energy range is very relevant for currently operational gridded ion thrusters, and exhibits high dependence on angles of incidence and emission as well as incident energy. To address this problem, the Doppler profiles and relative density of molybdenum atoms sputtered from a small, rotatable target by an independently rotatable ion source were determined by laser-induced fluorescence, the first study of its type for the molybdenum element. The profiles were obtained for various emission angles about the target normal as well as for multiple angles of incidence, and ion impingement energies of 250 and 550 eV. The velocity distributions obtained at each incidence angle, field angle, and beam energy were well-fitted to a Thompson distribution. The fittingparameter trends are discussed with reference to angles of incidence and emission, and the impingement energy.
机译：对于能量低于1 keV的撞击离子，以前尚未测量过溅射钼的角特性。 0.2 – 1 keV的能量范围与当前运行的栅极离子推进器非常相关，并且对入射角和发射角以及入射能量高度依赖。为了解决这个问题，通过激光诱导的荧光确定了由一个可独立旋转的离子源从一个小的可旋转靶溅射出的钼原子的多普勒分布和相对密度，这是对钼元素类型的首次研究。对于围绕目标法线的各种发射角以及多个入射角以及250和550 eV的离子碰撞能量，获得了这些轮廓。在每个入射角，视场角和束能量处获得的速度分布都非常适合汤普森分布。参照入射角和发射角以及碰撞能量讨论拟合参数趋势。

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