In situ Long Trace Profiler for measurement of Wolter type-I mirror

机译：原位Long Trace Profiler用于测量Wolter I型反射镜

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The surface profile of Wolter type-I mirror has a great impact on the performance of Solar X-ray Telescope. According to the existing fabrication instrument and experimental conditions in our lab, an in situ Long Trace Profiler is developed and set up on the fabrication instrument in order to measure the surface profile of Wolter mirror in real time during fabrication process. Its working mechanism, structural parameters and data processing algorithm are investigated. The prototype calibrated by a standard plane mirror is used to measure a sample of Wolter type-I mirror. The results show that our prototype can achieve an accuracy of 2.6 μrad rms for slope error with a stability of 1.33 μrad duringrnthe whole measurement period. This can meet further fabrication requirements.

机译：沃尔特I型镜的表面轮廓对太阳能X射线望远镜的性能有很大影响。根据我们实验室现有的制造仪器和实验条件，开发并在制造仪器上安装了一个原位长痕迹轮廓仪，以便在制造过程中实时测量Wolter镜的表面轮廓。研究了其工作机理，结构参数和数据处理算法。通过标准平面镜校准的原型用于测量I型沃尔特镜的样品。结果表明，在整个测量期间，我们的原型可以实现2.6μradrms的斜率误差精度，稳定度为1.33μrad。这可以满足进一步的制造要求。

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来源
《Advances in metrology for x-ray and EUV optics III》|2010年|p.78010L.1-78010L.10|共10页
会议地点 San Diego CA(US)
作者
Tian Gang Cui; Yong Gang Wang; Wen Sheng Ma; Bo Chen;
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作者单位

Changchun institute of optics, fine mechanics and physics, Chinese Academy of Sciences, Changchun, 130033, China Graduate School of the Chinese Academy of Sciences, Beijing, 100039, China;

Changchun institute of optics, fine mechanics and physics, Chinese Academy of Sciences, Changchun, 130033, China Graduate School of the Chinese Academy of Sciences, Beijing, 100039, China;

Changchun institute of optics, fine mechanics and physics, Chinese Academy of Sciences, Changchun, 130033, China;

Changchun institute of optics, fine mechanics and physics, Chinese Academy of Sciences, Changchun, 130033, China;

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原文格式 PDF
正文语种 eng
中图分类光学计量仪器;
关键词
surface metrology; Long Trace Profiler; in situ measurement; slope error;

机译：表面计量长跟踪探查器；原位测量斜率误差;

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2. Cold Neutron Focusing with a Wolter Type-I Mirror [J] . Sadao Aoki, Tsuyoshi Yamamoto, Jun Furukawa Japanese journal of applied physics . 2012,第2Issue1期

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3. Precise measuring method for detecting the in situ distortion profile of a high-heat-load mirror for synchrotron radiation by use of a pentaprism long trace profiler [J] . Qian SN, Jark W, Sostero G, Applied optics . 1997,第16期

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4. Precise measuring method for detecting the in situ distortion profile of a high-heat-load mirror for synchrotron radiation by use of a pentaprism long trace profiler [J] . Shinan Qian, Werner Jark, Giovanni Sostero Applied optics . 1997,第16a18期

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5. In situ Long Trace Profiler for measurement of Woltertype-I mirror [C] . Tian Gang Cui, Yong Gang Wang, Wen Sheng Ma, SPIE on Advances in Metrology for X-ray and EUV Optics . 2010

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7. Profile measurement of concave spherical mirror and a flat mirror using a high-speed nanoprofiler [O] . Koji Usuki, Takao Kitayama, Hiroki Matsumura, 2013

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9. Synchrotron radiation and precision mirror metrology with a long trace profiler [R] . Qian, S. , Takacs, P. Z. , Li, H. 1997

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In situ Long Trace Profiler for measurement of Wolter type-I mirror

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