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Angular calibration of surface slope measuring profilers with a bendable mirror

机译：用可弯曲反射镜对表面坡度测量轮廓仪进行角度校准

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Performance of state-of-the-art surface slope measuring profilers, such as the Advanced Light Source's (ALS) long trace profiler (LTP-Ⅱ) and developmental LTP (DLTP) is limited by the instrument's systematic error. The systematic error is specific for a particular measurement arrangement and, in general, depends on both the measured surface slope value and the position along a surface under test. Here we present an original method to characterize or measure the instrument's systematic error using a bendable X-ray mirror as a test surface. The idea of the method consists of extracting the systematic error from multiple measurements performed at different mirror bendings. An optimal measurement strategy for the optic, under different settings of the benders, and the method of accurate fitting of the measured slope variations with characteristic functions are discussed. We describe the procedure of separation of the systematic error of an actual profiler from surface slope variation inherent to the optic. The obtained systematic error, expressed as a function of the angle of measurement, is useful as a calibration of the instrument arranged to measure an optic with a close curvature and length. We show that accounting for the systematic error enables the optimal setting of bendable optics to the desired ideal shape with accuracy limited only by the experimental noise. Application of the method in the everyday metrology practice increases the accuracy of the measurements and allows measurements of highly curved optics with accuracy similar to those achieved with flat optics. This work was supported by the U.S. Department of Energy under Contract No. DE-AC02-05CH11231.
机译：先进的表面坡度测量轮廓仪的性能受到仪器系统误差的限制，例如高级光源（ALS）长迹轮廓仪（LTP-Ⅱ）和显影LTP（DLTP）。系统误差特定于特定的测量装置，并且通常取决于测得的表面斜率值和沿被测表面的位置。在这里，我们介绍了使用可弯曲的X射线镜作为测试表面来表征或测量仪器系统误差的原始方法。该方法的思想包括从在不同镜面弯曲处进行的多次测量中提取系统误差。讨论了在弯曲机不同设置下光学器件的最佳测量策略，以及利用特征函数精确拟合所测斜率变化的方法。我们描述了从光学器件固有的表面坡度变化中分离出实际轮廓仪的系统误差的过程。所获得的系统误差（表示为测量角度的函数）可用作校准仪器的校准，该仪器用于测量曲率和长度均很近的光学元件。我们表明，解决系统误差可将可弯曲光学元件最佳设置为所需的理想形状，而精度仅受实验噪声的限制。该方法在日常计量实践中的应用提高了测量的准确性，并允许对高度弯曲的光学器件进行测量，其精确度与平面光学器件相似。这项工作得到了美国能源部根据合同号DE-AC02-05CH11231的支持。

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