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首页> 外文会议>Advances in Thin-Film Coatings for Optical Applications III >Analysis of (TiO_2)_X(Ta_2O_5)_(1-X) composite films prepared by Radio Frequency Ion Beam Sputtering Deposition
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Analysis of (TiO_2)_X(Ta_2O_5)_(1-X) composite films prepared by Radio Frequency Ion Beam Sputtering Deposition

机译：射频离子束溅射沉积制备（TiO_2）_X（Ta_2O_5）_（1-X）复合薄膜的分析

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Using two or more materials to deposit a composite film has an advantage to get a film with desired refractive index. Besides, its optical property and mechanical property are better than a film deposited by a single material. In this study, (TiO_2)_X(Ta_2O_5)_(1-X) composite films have been prepared by a radio frequency ion beam sputtering deposition (RF-IBSD) where x was determined by the area ratio of titanium to tantalum targets. The optical constants of (TiO_2)_X(Ta_2O_5)_(1-X) composite films were calculated from their spectra by using envelope method. The refractive indices ranged from 2.481 to 2.165 at 550nm, and the extinction coefficients were lower than 1x10~(-3) for wavelength in the ranges of 400nm to 600nm and lower than 1x10~(-4) for wavelength longer than 600nm. The surface roughness of all composite films was about 0.1nm. The stress decreased from -520MPa for pure TiO_2 film to less than -280MPa for the composite films as measured by a phase-shift Twyman-Green interferometer. When the content of TiO_2 was less than 79.5%, the composite films were amorphous even post-baked to 400℃ as measured by x-ray diffraction. The composite films mixed with TiO_2 and Ta_2O_5 can improve thermal stability and reduce extinction coefficient and stress. Composite films can replace the conventional high refractive index layer prepared by a single material to fabricate multilayer filters, and it is also suitable for high temperature applications, such as high reflection coating of projector lamps.
机译：使用两种或更多种材料来沉积复合膜具有获得具有所需折射率的膜的优点。此外，其光学性能和机械性能优于单一材料沉积的薄膜。在这项研究中，通过射频离子束溅射沉积（RF-IBSD）制备了（TiO_2）_X（Ta_2O_5）_（1-X）复合膜，其中x由钛与钽靶材的面积比确定。采用包络法从（TiO_2）_X（Ta_2O_5）_（1-X）复合薄膜的光谱中计算出光学常数。 550nm处的折射率在2.481至2.165之间，并且对于400nm至600nm范围内的波长，消光系数小于1x10〜（-3），而对于大于600nm处的波长，其消光系数小于1x10〜（-4）。所有复合膜的表面粗糙度约为0.1nm。通过相移Twyman-Green干涉仪测量，应力从纯TiO_2薄膜的-520MPa降低到复合薄膜的-280MPa以下。当TiO_2的含量小于79.5％时，通过X射线衍射测定，即使后烘烤至400℃，复合膜也为非晶态。掺有TiO_2和Ta_2O_5的复合薄膜可提高热稳定性，降低消光系数和应力。复合膜可以代替由单一材料制备的常规高折射率层来制造多层滤光片，并且它还适用于高温应用，例如投影仪灯的高反射涂层。

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