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首页> 外文会议>American Society of Mechanical Engineers(ASME)/Society of Tribologists and Lubrication Engineers(STLE) International Joint Tribology Conference 2004(IJTC 2004) vol.1 pt.A; 20041024-27; Long Beach,CA(US) >BOUNCING MODE ELECTROSTATICALLY ACTUATED SCANNING MICROMIRROR FOR LASER DISPLAY APPLICATIONS
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BOUNCING MODE ELECTROSTATICALLY ACTUATED SCANNING MICROMIRROR FOR LASER DISPLAY APPLICATIONS

机译：用于激光显示应用的弹起模式静电驱动扫描微镜

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摘要

In laser display applications, the necessity to create images free of distortions imposes specific requirements on the motion of scanning devices. We present an approach of a scanning mi-cromirror operation that is aimed to fulfill the requirements of motion linearity, high operational frequency and low actuation voltages. The operational mode incorporates a contact event between the mirror and an elastic constraint followed by a bouncing event and a subsequent inversion of motion. A stable limit cycle with voltage-dependent frequency and triangular response signal is obtained by the application of an actuation voltage which is piecewise constant in time. Approximate expressions relating the frequency and amplitude of the response with the actuating voltage are obtained by energy balance method. The influence of contact losses on the response as well as the stability of the limit cycle are studied numerically.
机译：在激光显示应用中，创建无失真图像的必要性对扫描设备的运动提出了特定要求。我们提出一种扫描微镜操作的方法，旨在满足运动线性，高工作频率和低驱动电压的要求。该操作模式包括反射镜和弹性约束之间的接触事件，随后的弹跳事件和随后的运动反转。通过施加在时间上分段恒定的激励电压，可以获得具有取决于电压的频率和三角响应信号的稳定极限周期。通过能量平衡方法获得将响应的频率和幅度与驱动电压相关的近似表达式。数值研究了接触损耗对响应的影响以及极限循环的稳定性。

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