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首页> 外文会议>Conference on Laser Materials Processing Vol.85e: Rapid Prototyping and Microfabrication, Nov 16-19, 1998, Orlando, FL USA >Advanced Strategies for Three-dimensional Micro-structuring with Excimer Lasers
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Advanced Strategies for Three-dimensional Micro-structuring with Excimer Lasers

机译：利用准分子激光器进行三维微结构化的高级策略

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摘要

In recent years the development of micro-system-technologies has gained in importance due to the increasing demand for integrated micro-components, such as sensors or fiberoptical parts for use in information technologies, automotive, medical and electronic industries. The three-dimensional micro-structuring of workpieces is therefore a very interesting field for different applications. Especially for manufacturing prototypes or small batch sizes, processes are used that make the structuring of complex workpieces, after a short planning stage, possible. By using an excimer laser and a micro-processing machine with a flexible CNC controlled beam forming coupled with a precise workpiece handling, micro-structures can be produced without using expensive and workpiece-specific masks. When using this bulk micro machining, the structures are generated by the iterative ablation of single laser pulses. To generate the complex NC code for such a structuring process, a CAD-CAM software has been developed, that allows the direct transformation of CAD-designed micro-components into an NC code. This code can be used to control an excimer laser based micro-machine. Within this software strategies and algorithms were implemented, that allow the three-dimensional structuring of workpieces within a short time with a high surface quality.
机译：近年来，由于对集成微组件（例如用于信息技术，汽车，医疗和电子行业的传感器或光纤部件）的需求不断增加，微系统技术的发展变得越来越重要。因此，工件的三维微观结构对于不同的应用是一个非常有趣的领域。特别是对于制造原型或小批量生产，在短时间的规划阶段之后，就可以使用使复杂工件结构化的过程。通过使用受激准分子激光器和带有柔性CNC控制光束形成以及精确工件处理的微处理机，可以在不使用昂贵且特定于工件的掩模的情况下生产微结构。当使用这种批量微加工时，通过单个激光脉冲的迭代烧蚀来生成结构。为了生成用于这种结构化过程的复杂NC代码，已经开发了CAD-CAM软件，该软件允许将CAD设计的微组件直接转换为NC代码。该代码可用于控制基于准分子激光器的微型机器。在该软件中，实施了各种策略和算法，可以在短时间内以高表面质量对工件进行三维结构化。

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