Novel MWIR microspectrometer based on a tunable detector

机译：基于可调检测器的新型MWIR显微光谱仪

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In this paper we present basic designs, operation concepts and some application examples of a novel microspectrometer for the spectral range of 3-5 μm, which is based on a pyroelectric detector with an integrated micromachined Fabry-Perot filter (FPF). We discuss the influence of different optical setups on the spectral resolution and the signal-to-noise ratio of the microspectrometer. Two basic operation modes, step scan mode and continuous sweep mode are demonstrated. Such a device has a large potential in the field of infrared absorption spectroscopy, particularly if multicomponent mixtures have to be analyzed.

机译：在本文中，我们介绍了一种新型光谱仪（适用于3-5μm光谱范围）的基本设计，操作概念和一些应用示例，该光谱仪基于具有集成微机械Fabry-Perot滤波器（FPF）的热电探测器。我们讨论了不同光学设置对光谱仪的光谱分辨率和信噪比的影响。演示了两种基本操作模式，即步进扫描模式和连续扫描模式。这种装置在红外吸收光谱学领域中具有很大的潜力，特别是在必须分析多组分混合物的情况下。

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来源
《Conference on MOEMS and miniaturized systems VIII; 20090127-28; San Jose, CA(US)》|2009年|P.72080D.1-72080D.8|共8页
会议地点 San Jose CA(US)
作者
Norbert Neumann; Martin Ebermann; Steffen Kurth; Karla Hiller;
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作者单位

InfraTec GmbH, Gostritzer Str. 61-63, 01217 Dresden, Germany;

InfraTec GmbH, Gostritzer Str. 61-63, 01217 Dresden, Germany;

Chemnitz Univ. of Technology, Center for Microtechnologies, 09107 Chemnitz;

Fraunhofer Research Institution for Electronic Nano Syste;

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原文格式 PDF
正文语种 eng
中图分类光电子技术、激光技术;
关键词
fabry-perot interferometer; MWIR microspectrometer; tunable infrared detector;

机译：法珀干涉仪;微波红外光谱仪;可调红外探测器;

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专利

1. Monolithically integrated microspectrometer-on-chip based on tunable visible light MEMS FPI [J] . Rissanen A., Kantoj?rvi U., Blomberg M., Sensors and Actuators, A. Physical . 2012,第Null期

机译：基于可调式可见光MEMS FPI的单片集成芯片级光谱仪
2. Monolithically integrated microspectrometer-on-chip based on tunable visible light MEMS FPI [J] . Rissanen A., Kantoj?rvi U., Blomberg M., Sensors and Actuators, A. Physical . 2012,第Null期

机译：基于可调式可见光MEMS FPI的单片集成芯片级光谱仪
3. Tunable Infrared Microspectrometer Based on Bragg Grating [J] . Chitteboyina M. M., Butler D. P. IEEE Journal of Quantum Electronics . 2008,第2期

机译：基于布拉格光栅的可调谐红外光谱仪
4. Novel MWIR microspectrometer based on a tunable detector [C] . Norbert Neumann, Martin Ebermann, Steffen Kurth, Conference on MOEMS and miniaturized systems . 2009

机译：基于可调谐探测器的新型MWIR微临分镜
5. A Tunable Terahertz Detector based on Self-Assembled Plasmonic Structure on a GaAs 2-Dimensional Electron Gas. [D] . Bae, Che Jin. 2014

机译：基于GaAs二维电子气上自组装等离子体结构的可调太赫兹检测器。
6. Mid-Infrared Tunable Resonant Cavity Enhanced Detectors [O] . Niels Quack, Stefan Blunier, Jurg Dual, 2008

机译：中红外可调谐振腔增强型探测器
7. I3.1 - Design, Operation and Performance of a Fabry-Perot-Based MWIR Microspectrometer [O] . Martin Ebermann, Norbert Neumann, Karla Hiller, 2009

机译：I3.1 - 基于法布里 - 珀罗的MWIR微旋光器的设计，操作和性能
8. Low Temperature Noise Measurement of an InAs/GaSb-based nBn MWIR Detector. [R] . Cowan, V. M., Morath, C. P., Myers, S., 2011

机译：基于Inas / Gasb的nBn mWIR探测器的低温噪声测量。

Novel MWIR microspectrometer based on a tunable detector

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