Low noise surface mapping of transparent plane- parallel parts with a low coherence interferometer

机译：透明平面平行零件的低噪声表面映射和低相干干涉仪

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A new instrument for measurements of thin transparent flats incorporates a novel in-line normal-incidence equal path interferometer, and extended broad-band illumination to isolate the surface of interest while reducing coherent noise and artifacts. Incorporating a 4Mpix camera, matching high resolution imaging system and vibration robust design; the instrument satisfies the needs of current and future hard disk and pellicle metrology.

机译：一种用于测量薄的透明平板的新仪器，结合了新颖的直插法向入射等径干涉仪和扩展的宽带照明，以隔离目标表面，同时减少相干噪声和伪影。配备4Mpix相机，匹配的高分辨率成像系统和防振设计；该仪器可以满足当前和将来的硬盘和薄膜计量要求。

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来源
《Dimensional optical metrology and inspection for practical applications》|2011年|p.81330G.1-81330G.9|共9页
会议地点 San Diego CA(US)
作者
Leslie L. Deck; Peter J. de Groot;
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作者单位

Zygo Corporation, Laurel Brook Road, Middlefield, CT. USA, 06455-0448;

Zygo Corporation, Laurel Brook Road, Middlefield, CT. USA, 06455-0448;

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原文格式 PDF
正文语种 eng
中图分类光度学（测光学）;
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Low noise surface mapping of transparent plane- parallel parts with a low coherence interferometer

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