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Assessment of the CBR quantum transport simulator on experimentally fabricated nano-FinFET

机译:在实验制造的纳米FinFET上评估CBR量子传输模拟器

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摘要

We have utilized fully self-consistent quantum mechanical simulator based on Contact Block Reduction (CBR) method, to simulate experimentally fabricated 10nm FinFET device. A series of simulations have been performed with varying S/D extension length and doping profile to match the experimental data. The simulation results have been found to be in good agreement with the experimental data in the subthreshold regime. Small signal analysis has been performed to extract device capacitances and to compare the intrinsic propagation delay to that of experimental device.
机译:我们已经利用基于接触块减少(CBR)方法的完全自洽量子力学模拟器来模拟实验制造的10nm FinFET器件。已经使用不同的S / D延伸长度和掺杂轮廓进行了一系列仿真,以匹配实验数据。已经发现模拟结果与亚阈值范围内的实验数据非常吻合。已经进行了小信号分析,以提取器件电容并将本征传播延迟与实验器件的传播延迟进行比较。

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