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A confocal micro-imaging system incorporating a thermally actuated two axis MEMS scanner

机译：共焦微成像系统结合了热驱动的两轴MEMS扫描仪

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摘要

For in-vivo imaging applications the use of conventional confocal microscope systems are simply not practical due to their relatively large size and weight. There is, however, great interest from both the life science research community and the clinical profession for the development of compact and portable micro-optical instrumentation capable of achieving minimally invasive, in-vivo imaging of tissue with sub-cellular resolution. In this paper we describe a novel confocal micro-imaging system incorporating, at its core, a thermally driven, non-resonant two-axis MEMS scanner which serves as a substitute for the two single-axis galvanometer scanners commonly used in standard confocal imaging systems. In this paper we describe the non-linearity of such devices and a number of techniques to compensate for this.
机译：对于体内成像应用，常规的共聚焦显微镜系统由于其相对较大的尺寸和重量而根本不实用。然而，生命科学研究领域和临床专业人士都对开发紧凑和便携式微光学仪器的兴趣很大，该仪器能够实现具有亚细胞分辨率的组织的微创，体内成像。在本文中，我们描述了一种新颖的共聚焦微成像系统，其核心包含一个热驱动的非共振两轴MEMS扫描仪，该扫描仪可以替代标准共聚焦成像系统中常用的两个单轴振镜扫描仪。在本文中，我们描述了此类设备的非线性以及弥补这一问题的多种技术。

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  • 来源
    《Endoscopic microscopy IV》|2009年|717203.1-717203.9|共9页
  • 会议地点 San Jose CA(US)
  • 作者

    Simon P. Poland; Lijie Li; Deepak Uttamchandani; John M. Girkin;

  • 作者单位

    Institute of Photonics, University of Strathclyde, Wolfson Centre, 106 Rottenrow, Glasgow, G4 0NW, United Kingdom;

    Centre for Microsystems and Photonics, EEE, University of Strathclyde, 204 George Street, Glasgow, G1 1XW, United Kingdom;

    Centre for Microsystems and Photonics, EEE, University of Strathclyde, 204 George Street, Glasgow, G1 1XW, United Kingdom;

    Institute of Photonics, University of Strathclyde, Wolfson Centre, 106 Rottenrow, Glasgow, G4 0NW, United Kingdom;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    confocal microscopy; MEMS; biological imaging; endoscopy;

    机译：共聚焦显微镜MEMS;生物成像内窥镜检查;

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