Optimization of a Simulation for 300mm FAB Semiconductor Manufacturing

机译：300mm FAB半导体制造仿真的优化

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Many processes are composed of Bays with equipments. Most 300mm wafer lines use AMHS (Automated Material Handling System) for inter-bay and intra-bay lot transportation. In particular, the inter-bay AMHS moves lots between stackers, whereas intra-bay AMHS moves lots between stackers and tools, or between tools within the same bay. Most companies are trying to reduce average cycle time to increase productivity and delivery time. In this paper, we proposed simulation process standardization method in 300mm FAB semiconductor manufacturing process to propose simulation model verification method. Also we tried to prove efficiency of adopting the simulation theory in real production line.

机译：许多过程由带设备的海湾组成。大多数300毫米晶圆生产线都使用AMHS（自动材料处理系统）进行海湾间和海湾内批次运输。特别是，托架间AMHS在堆垛机之间移动很多，而托架内AMHS在堆垛机和工具之间或同一托架内的工具之间移动很多。大多数公司都在尝试减少平均周期时间以提高生产率和交货时间。本文提出了300mm FAB半导体制造过程中的仿真过程标准化方法，提出了仿真模型验证方法。我们还试图证明在实际生产线中采用仿真理论的效率。

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来源
《International Conference on Computational Science and Its Applications(ICCSA 2006) pt.5; 20060508-11; Glasgow(GB)》|2006年|P.260-268|共9页
会议地点 Glasgow(GB)
作者
DongSik Park; Youngshin Han; Chilgee Lee;
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作者单位

School of Information and Communication Engineering SungKyunKwan University 300, Chunchun-dong, jangan-gu, Suwon,Kyunggi-do 440-746, S. Korea;

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原文格式 PDF
正文语种 eng
中图分类计算技术、计算机技术;
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3. A lean production system design for semiconductor crystal-ingot pulling manufacturing using hybrid Taguchi method and simulation optimization [J] . Taho Yang, Yuan-Feng Wen, Zong-Rui Hsieh, Assembly Automation . 2020,第3期

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4. Optimization of a Simulation for 300mm FAB Semiconductor Manufacturing [C] . DongSik Park, Youngshin Han, Chilgee Lee International Conference on Computational Science and Its Applications . 2006

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5. Orthogonal Spatial Material Flow structures with application to 300mm semiconductor fab automation. [D] . Ting, Juu-Hwa. 1999

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7. Integrating Dynamic Fab Capacity And Automation Models For 300mm Semiconductor Manufacturing [O] . J. A. Joines, R. R. Barton, K. Kang, 2007

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8. Projecto de um Modelo Matematico para Simulacao e Optimizacao em Computador deMoldes para Fabrico de Pecas Fundidas por 'Shell Moulding' (Product of a Mathematical Model for Simulation and Optimization by Computational Means of Moulds to the Manufacture o [R] . de Carvalho Ferreira, J. M. G. 1991

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Optimization of a Simulation for 300mm FAB Semiconductor Manufacturing

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