Study of diffusion coefficient and phase transitions in structures formed by dust particles in RF-discharge

机译：射频放电中粉尘颗粒形成的结构中扩散系数和相变的研究

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Diffusion coefficient and phase transitions in the structures formed by dust particles in a capacitive RF-discharge at low pressure were investigated and analysed. Experiments with variation of RF-discharge parameters (RF-power and gas pressure) for various sizes of particles were carried out. Diffusion coefficients at various phase states are presented. Velocities of dust particles and their kinetic energy were investigated. Parameters, to allow conclusions the phase condition of observed system has changed, were described and chosen.

机译：研究和分析了低压下射频电容放电中粉尘颗粒形成的结构中的扩散系数和相变。进行了各种尺寸的颗粒的RF放电参数（RF功率和气压）变化的实验。给出了各种相态下的扩散系数。研究了尘埃颗粒的速度及其动能。描述和选择了参数，以得出结论，即观察到的系统的相状态已改变。

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《International Conference on Phenomena in Ionized Gases(ICPIG 2003) vol.1; 20030715-20; Greifswald(DE)》|2003年|P.225-226|共2页
会议地点 Greifswald(DE)
作者
A.V. Gavrikov; I. A. Shakhova; O.S. Vaulina; O.F. Petrov; V. E. Fortov;
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作者单位

Institute for High Energy Densities, Russian Academy of Science, Moscow, Russia;

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原文格式 PDF
正文语种 eng
中图分类天然气加工;
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Study of diffusion coefficient and phase transitions in structures formed by dust particles in RF-discharge

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