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首页> 外文会议>International Conference on Single Crystal Growth and Heat amp; Mass Transfer(ICSC-2003) vol.2; 20030922-26; Obninsk(RU) >HYDRODYNAMIC AND GROWING PARAMETERS INFLUENCE ON OXYGEN DISTRIBUTION AT CZOCHRALSKI SILICON CRYSTAL GROWTH PROCESS
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HYDRODYNAMIC AND GROWING PARAMETERS INFLUENCE ON OXYGEN DISTRIBUTION AT CZOCHRALSKI SILICON CRYSTAL GROWTH PROCESS

机译：直晶硅晶体生长过程中的动力和生长参数对氧分布的影响

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摘要

The model submitted in the work allows to describe correctly the structure of melt flow, conveclive heal&mass transfer in the silicon crystals growth process with Czochralski technique. The offered method of the solution of heat&mass transfer equations in natural variables on irregular grids has the stability and high effectiveness and can be used in practical applications The problem analysis of simulation of a transfer and allocation of oxygen near interface for Czohralski technology and quartz crucible is given. The importance of good description of physic-chemical processes of dissolution of quartz in Si - melt is shown. On the model problem about a rotating disk the significance of good description of processes of hydrodynamics and heat exchange in a boundary layer on a wall of a quartz crucible is investigated. The good consent of calculation with theoretical and experimental dependences for a mass flux from rotation rate and properties of fluid is obtained. For a good resolution of processes in a boundary layer the thickening of cells of a grid with the first step of ～10~(-5) at the wall m is necessary. The dimensionless Reynolds number, Grashoff number and Froude number for crucibles of radius ～350 mm, crystals of radius ～100mm, rotation rate up to 8 rpm, temperature drops 20 K are analyzed. The conclusion is made that the non-stationary mixed convection develops in melt, direct numerical modeling without using of turbulence models is expedient.
机译：在工作中提交的模型可以正确地描述通过Czochralski技术在硅晶体生长过程中的熔体流动结构，对流愈合和质量转移。所提供的不规则网格自然变量的传热传质方程的求解方法具有稳定性和有效性，可以在实际应用中进行研究。给定的。显示了很好的描述石英在硅熔体中溶解的物理化学过程的重要性。在关于转盘的模型问题上，研究了很好地描述石英坩埚壁上边界层中流体动力学和热交换过程的重要性。得到了从旋转速度和流体特性对质量通量的理论和实验依赖性的良好计算同意。为了使边界层中的过程具有良好的分辨率，必须在m处以〜10〜（-5）的第一步加厚网格单元。分析了半径约350mm的坩埚的无量纲雷诺数，格拉索夫数和弗洛德数，半径约100mm的晶体，转速高达8 rpm，温度下降20K。得出的结论是，非平稳混合对流在熔体中发展，不使用湍流模型直接进行数值模拟是有利的。

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