Effect of Nano-structures on the Optical Features of Hydrogenated Amorphous Si Films

机译：纳米结构对氢化非晶硅薄膜光学特性的影响

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Hydrogenated amorphous Si (a-Si:H) films were prepared by plasma enhanced chemical vapor deposition (PECVD) techniques, and the effect of nano-structure on the photoluminescence (PL) phenomena of the films was investigated. The films, which were prepared at R.T., contain both amorphous and crystalline phases of 1 ～ 3 nm size nano-crystallites with {100} orientation preference while the films prepared at 500℃ are composed of about 6 nm and 150 nm size crystallites. The former exhibit a strong PL intensity near blue light region, while the latter exhibiting little PL phenomena; also, the optical band gap of the former was calculated at 4.2 eV.

机译：采用等离子增强化学气相沉积（PECVD）技术制备了氢化非晶硅（a-Si：H）薄膜，研究了纳米结构对薄膜光致发光（PL）现象的影响。在R.T.制备的薄膜包含1〜3 nm尺寸的纳米晶体的非晶相和结晶相，具有{100}取向优先性，而在500℃下制备的薄膜由约6 nm和150 nm尺寸的晶体组成。前者在蓝光区域附近表现出很强的PL强度，而后者则几乎没有PL现象。同样，前者的光学带隙经计算为4.2 eV。

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来源
《International Symposium on Eco-Materials Processing amp; Design; 20060108-11; Chengdu(CN)》|2006年|P.954-957|共4页
会议地点 Chengdu(CN)
作者
Myung-Beom Park; Jae-Hyun Shim; Nam-Hee Cho;
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作者单位

Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, United Kingdom;

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原文格式 PDF
正文语种 eng
中图分类工程材料一般性问题;
关键词
hydrogenated amorphous Si; optical band gap; photoluminescence;

机译：氢化非晶硅；光学带隙；光致发光;

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1. Specific features of photoelectric and optical properties of amorphous hydrogenated silicon films produced by plasmochemical deposition from monosilane-hydrogen mixture [J] . Kazanskii A.G., Terukov E.I., Forsh P.A., Semiconductors . 2011,第4期

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2. Optical and Structural Features of Silicon-Rich Hydrogenated Amorphous Silicon Nitride Thin Films [J] . Sarab Preet Singh, Claudio J. Oton, P. Srivastava, Journal of nanoscience and nanotechnology . 2011,第12期

机译：富含硅的氢化非晶氮化硅薄膜的光学和结构特征
3. Effect of Annealing on the Optical and Chemical Bonding Properties of Hydrogenated Amorphous Carbon and Hydrogenated Amorphous Carbon Nitride Thin Films [J] . Richard Ritikos, Chow Chee Siong, Siti Meriam Ab. Gani, Japanese journal of applied physics . 2009,第10期

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4. Effect of Nano-structures on the Optical Features of Hydrogenated Amorphous Si Films [C] . Myung-Beom Park, Jae-Hyun Shim, Nam-Hee Cho, International Symposium on Eco-Materials Processing Design . 2006

机译：纳米结构对氢化无晶硅膜光学特征的影响
5. Proton NMR studies of PECVD hydrogenated amorphous silicon films and HWCVD hydrogenated amorphous silicon films. [D] . Herberg, Julie Lynn. 2002

机译：PECVD氢化非晶硅膜和HWCVD氢化非晶硅膜的质子NMR研究。
6. Refinement of Sustainable Polybutylene Adipate Terephthalate (PBAT) with Amorphous Hydrogenated Carbon Films (a-C:H) Revealing Film Instabilities Influenced by a Thickness-Dependent Change of sp2/sp3 Ratio [O] . Torben Schlebrowski, Halima Acharchi, Barbara Hahn, 2020

机译：非晶氢化碳膜（a-C：H）精制可持续的聚己二酸对苯二甲酸丁二醇酯（PBAT）揭示了膜厚度随sp2 / sp3比率变化而变化的不稳定性
7. π bands and gap states from optical absorption and electron-spin-resonance studies on amorphous carbon and amorphous hydrogenated carbon films [O] . Dasgupta, D., Demichelis, F., Pirri, Candido, 1991

机译：来自非晶碳和非晶氢化碳膜的光吸收和电子自旋共振研究的π能带和能隙状态
8. Preparation and Characterization of Hydrogenated Amorphous-Silicon Films Produced by Ion Plating and Hydrogenated Amorphous-Boron Films Produced by Glow-Discharge Decomposition. Final Report, April 1, 1980-May 31, 1981 [R] . Cocks F.H, Jones, P. L. 1981

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Effect of Nano-structures on the Optical Features of Hydrogenated Amorphous Si Films

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