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首页> 外文会议>International Workshop on Microfactories vol.1; 20041015-17; Shanghai(CN) >A Novel Technique of Producing Carbon Nanotubes Cold Cathode Thin Film
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A Novel Technique of Producing Carbon Nanotubes Cold Cathode Thin Film

机译：碳纳米管冷阴极薄膜的生产新技术

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摘要

A novel fabrication process of carbon nanotubes emitters with filed emission properties is presented in the paper. Carbon nanotubes powder is synthesized by DC arc discharge. The purified carbon nanotubes suspension with high concentration was produced after we purifying and filtering the powder. Carbon nanotubes suspension is dropped on metal or silicon substrate. Special treatment technique is done to improve the adhesion between the carbon nanotubes and the substrate. Compared with carbon nanotubes thin film produced by other fabrication processes, i.e. chemical vapor deposition and screen printing et al, the kind of carbon nanotubes thin film can be attained more easily, which will be able to widen greatly the application range of carbon nanotubes. After vacuum annealing surface treatment, the measurements of properties of field emission are carried out using a simple diode structure. The experiment results reveal that electron field emission of thus fabricated carbon nanotubes can be turned on at less than an electric field 4.2V/ μm (10 μA/cm~2) and can attain a current density of 4.8mA/cm~2 at an electric field of 7.5V/μm, following the Fowler-Nordheim behavior. Moreover, the carbon nanotubes thin film produced using the method is proved to have excellent adhesion with the substrate.
机译：本文提出了一种具有场发射特性的新型碳纳米管发射器制造工艺。碳纳米管粉末是通过直流电弧放电合成的。我们对粉末进行纯化和过滤后，得到了高浓度的纯化碳纳米管悬浮液。碳纳米管悬浮液滴在金属或硅基板上。进行了特殊的处理技术以改善碳纳米管与基材之间的粘附力。与通过化学气相沉积和丝网印刷等其他制造工艺生产的碳纳米管薄膜相比，可以更容易地获得碳纳米管薄膜的种类，这将大大拓宽碳纳米管的应用范围。经过真空退火表面处理后，使用简单的二极管结构进行场发射特性的测量。实验结果表明，所制得的碳纳米管的电场发射可以在小于4.2V /μm（10μA/ cm〜2）的电场下开启，并且在48V的电流密度下可获得4.8mA / cm〜2的电流密度。遵循Fowler-Nordheim行为的7.5V /μm电场。此外，已证明使用该方法生产的碳纳米管薄膜具有与基材的优异粘合性。

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