• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Laser-based micro- and nanoprocessing X >Enhancing ablation efficiency in micro structuring using a deformable mirror for beam shaping of ultra-short laser pulses
【24h】

Enhancing ablation efficiency in micro structuring using a deformable mirror for beam shaping of ultra-short laser pulses

机译：使用可变形反射镜对超短激光脉冲进行光束整形，提高微结构的烧蚀效率

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Using ultra-short laser pulses for the generation of microstructures results in a high flexible tool for free form geometries in the micro range. Increasing laser power and repetition rates increase as well the demand of high flexible and efficient process strategies. To increase the ablation efficiency the optimal fluency can be determined, which is a material specific value. By varying the beam shape, the ablation efficiency can be enhanced. In this study a deformable mirror was used to vary the beam shape. This mirror is built by combining a piezo-electric ceramic and a mirror substrate. The ceramic is divided into several segments, which can be controlled independently. This results in a high flexible deformable mirror which influences the beam shape and can be used to vary the spot size or generate line geometries. The ablation efficiency and roughness of small generated cavities were analyzed in this study as well as the dimensions of the cavity. This can be used to optimize process strategies to combine high volume ablation and fine detail generation.
机译：使用超短激光脉冲生成微观结构可产生高度灵活的工具，用于微观范围内的自由形状。激光功率和重复频率的增加以及对高度灵活和高效的处理策略的需求也在增加。为了增加消融效率，可以确定最佳的流利度，其是材料的特定值。通过改变光束形状，可以提高烧蚀效率。在这项研究中，使用可变形镜来改变光束形状。该镜是通过将压电陶瓷和镜基板组合在一起而制成的。陶瓷分为几个部分，可以独立控制。这样就产生了一个高柔性可变形反射镜，该反射镜会影响光束的形状，并可用于改变光斑尺寸或生成线的几何形状。在这项研究中分析了小腔的消融效率和粗糙度，以及腔的尺寸。这可以用来优化工艺策略，以结合大量的烧蚀和精细的细节生成。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号