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On-wafer electro-mechanical characterization of silicon MEMS switches

机译：硅MEMS开关的晶圆上机电特性

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The feasibility of integrating the RF MEMS switches in space and wireless communication systems has generated tremendous interest in related design, fabrication and characterization methodologies. The space applications make long term reliability of the devices a very pertinent issue and involves both the process and device characterization. In this paper we describe the experimental setup and measurement results on RF MEMS switches fabricated for DC to 30 GHz applications. The on-wafer experimental setup, based on standard manual microprobe station provides dual pulse actuation voltage waveforms with programmable period and amplitude, ranging from 10-5 to 1 sec and 0-200 volts respectively. The usefulness of the dual-pulse testing is demonstrated by the minimal charge generation in the dielectric layer and capacitance measurements with negligible variations over long measurement periods.
机译：在空间和无线通信系统中集成RF MEMS开关的可行性引起了对相关设计，制造和表征方法的极大兴趣。空间应用使设备的长期可靠性成为一个非常相关的问题，涉及过程和设备特性。在本文中，我们描述了为直流至30 GHz应用而制造的RF MEMS开关的实验设置和测量结果。基于标准手动微探针站的晶圆上实验装置可提供具有可编程周期和幅度的双脉冲激励电压波形，范围分别为10 -5 至1秒和0-200伏。双脉冲测试的有用性通过在电介质层中产生的电荷最少以及在较长的测量周期内变化可忽略不计的电容测量得到证明。

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