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首页> 外文会议>Mechatronics, 2009. ICM 2009 >Evaluation of asymmetric microfabricated surfaces using femtosecond laser process for microparts feeding
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Evaluation of asymmetric microfabricated surfaces using femtosecond laser process for microparts feeding

机译：飞秒激光工艺对不对称微加工表面进给微零件的评估

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Previously, we found that an asymmetric microfabricated surface can feed microparts along using simple planar symmetric vibrations. Microparts move forward because they adhere to the asymmetric surface asymmetrically. To feed along 0402-type capacitors (size, 0.4 times 0.2 times 0.2 mm; weight, 0.1 mg), we used a slight stainless shim tape microfabricated by a femtosecond laser processing tool, specifically the double-pulsed femtosecond laser irradiation technique, to generate an asymmetric profile surface. We then evaluated the characteristics of the microfabricated surface, including the effects of decreased adhesion, the differences in profiles of the two inclined surfaces, the coefficients of friction in both the forward and backward directions, and the friction angle of the 0402-type capacitors in both directions. Using the results of feeding of these capacitors, we assessed the relationship between driving frequency and feeding velocity. We also assessed two other microfabricated surfaces generated by the single beam femtosecond laser diagonal irradiation technique. We evaluated the asymmetry of these microfabricated surfaces based on measurements using an atomic force microscope (AFM) system. We then performed feeding experiments of 0402-type capacitors with the same driving conditions using newly and previously generated surfaces. Experimental results were compared to assess the surface most appropriate for feeding 0402-type capacitors.
机译：以前，我们发现不对称的微加工表面可以使用简单的平面对称振动来馈送微零件。微型零件向前移动是因为它们不对称地粘附在不对称表面上。为了馈入0402型电容器（尺寸为0.4乘以0.2毫米乘以0.2毫米；重量为0.1毫克），我们使用了由飞秒激光加工工具，特别是双脉冲飞秒激光辐照技术微加工而成的略微的不锈钢垫片带来产生非对称轮廓表面。然后，我们评估了微加工表面的特性，包括降低的附着力，两个倾斜表面的轮廓差异，前后方向的摩擦系数以及0402型电容器的摩擦角等影响。双向。使用这些电容器的馈电结果，我们评估了驱动频率和馈电速度之间的关系。我们还评估了单束飞秒激光对角线辐照技术产生的其他两个微加工表面。我们基于使用原子力显微镜（AFM）系统进行的测量，评估了这些微加工表面的不对称性。然后，我们使用新近和先前生成的表面在相同的驱动条件下进行了0402型电容器的馈电实验。比较了实验结果，以评估最适合给0402型电容器供电的表面。

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