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A improved muitilayer co-firing piezoelectric ceramics micro-motor

机译：改进的多层共烧压电陶瓷微电机

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摘要

An improved rotary piezoelectric micro-motor is studied in this paper.Different from the conventional traveling wave ultrasonic motor using a monolithic piezoelectric ceramic ring,several multilayer piezoelectric ceramic bulks (1.5mm×3mm×5mm) are obtained by low temperature co-fired technique and used to generate transverse vibration inside the ring type stator.The layout and electric signals applied to the piezoelectric ceramic bulks are designed for the purpose of generating elliptical trajectories on the teeth of the stator.The working mode of the prototype motor is simulated by the finite element method,and also measured by the Doppler Laser Vibrometer.It is shown that experimental results are in good agreement with simulation,which verifies the effectiveness of the finite element model.The prototype micro-motor could be driven at the low voltage of 15V under the frequency of 57.6 KHz.
机译：本文研究了一种改进的旋转压电微电机。与传统的单片压电陶瓷环行波超声电机不同，通过低温共烧技术获得了多个多层压电陶瓷块（1.5mm×3mm×5mm）。设计用于压电陶瓷块的布局和电信号，以在定子的齿上产生椭圆形轨迹。有限元方法，并用多普勒激光测振仪进行了测量。结果表明，实验结果与仿真结果吻合良好，验证了有限元模型的有效性。微型电机原型可以在15V的低压下驱动在57.6 KHz的频率下。

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  • 来源
    《》|2007年|203-208|共6页
  • 会议地点 Nanjing(CN)
  • 作者

    DAI Ying; rnMA Zujun;

  • 作者单位

    Ye Ji@State Key Lab.of New Ceramics and Fine Processing,Tsinghua University,Beijing 100084 P.R.China--Xiangcheng Chu@State Key Lab.of New Ceramics and Fine Processing,Tsinghua University,Beijing 100084 P.R.China--Longtu Li@State Key Lab.of New Ceramics and Fine Processing,Tsinghua University,Beijing 100084 P.R.China--Zhilun Gui@State Key Lab.of New Ceramics and Fine Processing,Tsinghua University,Beijing 100084 P.R.China--;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 压电陶瓷材料;
  • 关键词

    Piezoelectric micro-motor; multilayer piezoelectric ceramic; co-firing; FEM;

    机译：压电微电机多层压电陶瓷共烧有限元;

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